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- Title
Annular dark-field scanning confocal electron microscopy studied using multislice simulations.
- Authors
Hamaoka, Takumi; Jao, Chih-Yu; Takeguchi, Masaki
- Abstract
Annular dark-field scanning confocal electron microscopy (ADF-SCEM) has been studied using multislice simulations. Thermal diffuse scattering was considered in the calculations. Geometric aberrations of the lenses were introduced. A finite-sized pinhole was taken into consideration, in addition to an ideal point pinhole. ADF-SCEM images of Al crystals aligned along a zone-axis exhibit elongated contrast along the optic axis. Results of simulations suggest that if geometric aberrations of an imaging lens are corrected, depth resolution in ADF-SCEM can be improved by employing a large collection semi-angle of an annular aperture, even with a finite pinhole.
- Subjects
SCANNING electron microscopy; COPPER alloys; MONOCHROMATIC aberration; ELECTRONIC probes; GOLD nanoparticles
- Publication
Microscopy, 2018, Vol 67, Issue 4, p232
- ISSN
2050-5698
- Publication type
Article
- DOI
10.1093/jmicro/dfy023