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- Title
Laser synthesis of hybrid Fe/Cr 2D structures based on their oxides for thermo-sensors with high sensitivity.
- Authors
Mulenko, S. A.; Stefan, N.; Skoryk, M. A.; Popov, V. M.; Smirnov, A. B.; Gudymenko, O. Yo.
- Abstract
Semiconductors are considered promising materials for the fabrication of new thermo-sensors. The photons generated by a KrF laser source (λ = 248 nm, τFWHM ≤ 25 ns) at a fluency of 3.5, 4.5 or 5.5 J/cm2 were used for the synthesis of hybrid Fe/Cr 2D structures via the reaction of ablated iron and chromium atoms from combined target Fe/Cr with oxygen molecules (O2) by reactive pulsed laser deposition (RPLD) process. Hybrid Fe/Cr 2D structures of (50–130) nm thickness were deposited on 293, 500 or 800 K <100> Si substrates in O2 atmosphere of 0.1, 0.5 and 5.0 Pa. GIXD (grazing incident X-ray diffraction) analysis evidenced either amorphous or polycrystalline structures of the deposits. Element analysis was carried out by energy dispersive X-ray spectroscopy (EDXS). Semiconductor temperature trend was detected with variable energy band gap (Eg) in the range of (0.34–1.20) eV depending on the substrate temperature, O2 pressure, hybrid Fe/Cr 2D structure thickness and laser fluencies for atoms' ablation. The optimum conditions corresponding to the highest thermo-sensitivity (Seebeck coefficient) were reached. The highest obtained Seebeck coefficient of these 2D structures was high as 13 mV/K in the range of (290–340) K. An interpretation for such high thermo-sensitivity was provided. Therefore, these thermo-sensors are exceptionally strong candidates operating at moderate temperature.
- Subjects
ENERGY dispersive X-ray spectroscopy; PULSED laser deposition; SEEBECK coefficient; ENERGY bands
- Publication
Journal of Materials Science: Materials in Electronics, 2022, Vol 33, Issue 27, p21258
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-022-08850-1