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- Title
Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires.
- Authors
Sosada-Ludwikowska, Florentyna; Wimmer-Teubenbacher, Robert; Sagmeister, Martin; Köck, Anton
- Abstract
Metal oxide multi-nanowire-based chemical gas sensors were manufactured by a fast and simple transfer printing technology. A two-step method employing spray pyrolysis deposition and a thermal annealing process was used for SnO 2 nanowires fabrication. A polydimethylsiloxane stamp was used to transfer the SnO 2 nanowires on two different gas sensing devices—Si-based substrates and microhotplate-based platform chips. Both contained a metallic inter-digital electrode structure (IDES), on which the SnO 2 nanowires were transferred for realization of multi-NW gas sensor devices. The gas sensor devices show a very high response towards H 2 S down to the 10 ppb range. Furthermore, a good response towards CO has been achieved, where in particular the microhotplate-based devices exhibit almost no cross sensitivity to humidity.
- Subjects
CHEMICAL detectors; TRANSFER printing; STANNIC oxide; TECHNOLOGY transfer; NANOWIRES; METALLIC oxides
- Publication
Sensors (14248220), 2019, Vol 19, Issue 14, p3049
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s19143049