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- Title
Flux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target.
- Authors
Kolodko, D. V.; Kaziev, A. V.; Ageichenkov, D. G.; Lisenkov, V. Yu.
- Abstract
A group of high-energy positive O+ ions in a plasma flow from a high-current pulsed magnetron discharge with a hot target in an Ar/O2 gas mixture. The mechanism of occurrence of accelerated O+ ions is the conversion of negative ions accelerated in the cathode layer O– → O+ in the processes of charge exchange or ionization by electron impact.
- Subjects
CATIONS; ELECTRON impact ionization; MAGNETRONS; CHARGE exchange; GAS mixtures; GLOW discharges
- Publication
Journal of Communications Technology & Electronics, 2023, Vol 68, Issue 10, p1249
- ISSN
1064-2269
- Publication type
Article
- DOI
10.1134/S1064226923100078