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- Title
Thermal oxidative degradation of molybdenum films under laser ablation.
- Authors
Volkov, A.; Kazanskiy, N.; Moiseev, O.; Poletayev, S.
- Abstract
The problems of laser ablation of molybdenum films that are related to the formation of topological patterns of contact masks are discussed. The thermal oxidative degradation of thin molybdenum films under high-intensity laser irradiation is analyzed. The results of theoretical estimations are compared with the Raman data on the chemical composition of molybdenum oxide.
- Subjects
MOLYBDENUM oxides; LASER ablation; CHEMICAL decomposition; TOPOLOGY; THERMAL oxidation (Materials science)
- Publication
Technical Physics, 2015, Vol 60, Issue 2, p265
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784215020255