We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Modeling and Simulation of Triple Coupled Cantilever Sensor for Mass Sensing Applications.
- Authors
Siddaiah, Nalluri; koti Reddy, D. V. Rama; Sankar, Y. Bhavani; Kumar, R. Anil; Pakdast, Hossein
- Abstract
Cantilever sensors have been the growing attention in last decades and their use as a mass detector. This work presents design, modeling and analysis of Triple coupled cantilever (TCC) sensor using MEMS simulation software Comsol Multiphysics with critical dimensions of 100µm length, 20µm width and 2µm thickness. Simulations were performed based on finite element modeling techniques, where different resonant frequencies were observed for different modes of operation. It is also observed that the resonant frequency of the sensor decreases as some mass is applied on one particular cantilever. The various parameters greatly affecting the performance of TCC such as resonant frequency, dimensions, material and pressure or force applied on it. We also observed that while adding some mass on any one lateral cantilever, the resonant frequency of that respective mode reduced.
- Subjects
MICROCANTILEVERS; MASS spectrometers; MICROELECTROMECHANICAL systems; FINITE element method; CIRCUIT resonance; MATHEMATICAL models
- Publication
International Journal of Electrical & Computer Engineering (2088-8708), 2015, Vol 5, Issue 3, p403
- ISSN
2088-8708
- Publication type
Article