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- Title
Specific Features of Distribution and Relaxation of Elastic Stresses in Homoepitaxial CVD Films of Germanium and Diamond.
- Authors
Prokhorov, I. A.; Voloshin, A. E.; Romanov, D. A.; Bolshakov, A. P.; Ralchenko, V. G.
- Abstract
The real structures of epitaxial CVD films of germanium and diamond have been comparatively analyzed. The influence of the specific features of elastic-stress distribution in two-layer structures on the relaxation processes and dislocation distribution are considered. The influence of inhomogeneous (over thickness) plastic deformation, caused by the motion of dislocations under alternating elastic-stress field, on the formation of residual bending of substrates and films is shown by the example of epitaxial germanium structures. A significant difference in the relaxation processes in CVD films of diamond and germanium (crystallographic analog of diamond) is revealed.
- Publication
Crystallography Reports, 2019, Vol 64, Issue 3, p392
- ISSN
1063-7745
- Publication type
Article
- DOI
10.1134/S1063774519030222