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- Title
Specific features of relief formation on silicon etched by a focused ion beam.
- Authors
Gerasimenko, N.; Chamov, A.; Medetov, N.; Khanin, V.
- Abstract
The effect of a focused ion beam on the state of a silicon crystal surface has been studied. Periodic ring-shaped ribs have been observed on the walls of an etched cylindrical hole. The formation of periodic structures depends on the conditions of ion beam etching. The observed phenomenon is explained based on the notion of the radiation-induced plasticity.
- Subjects
SEMICONDUCTOR etching; SILICON; FOCUSED ion beams; SURFACES (Technology); MATERIAL plasticity; RADIATION
- Publication
Technical Physics Letters, 2010, Vol 36, Issue 11, p991
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785010110064