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- Title
Probe Technique for Measuring the Bohm Coefficient, Space-Charge Probe Layer Thickness, and Ion Mass.
- Authors
Masherov, P. E.; Ryabyi, V. A.
- Abstract
Abstract: We propose measuring the Bohm coefficient, thickness of the space-charge probe layer, and ion mass in Maxwellian low-pressure plasma based on the results of standard probe measurements using the Bohm effect, Boltzmann law, and "3/2" law in the case of their validity for the studied plasma. This possibility was implemented by comprehensive probe diagnostics of high-frequency xenon plasma of an induction discharge at a pressure of 2 mTorr. Analysis of the obtained results showed that these laws and the Bohm effect are valid with "engineering" accuracy, which made it possible to find Bohm coefficient CBCyl ≈ 1.23 for a cylindrical probe, which served as the basis of the proposed method.
- Subjects
PLASMA gases; XENON; THICKNESS measurement; ELECTROSTATIC induction; BOLTZMANN'S equation
- Publication
Technical Physics, 2018, Vol 63, Issue 12, p1743
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784218120101