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- Title
Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application.
- Authors
Masuda, M.; Sugioka, K.; Cheng, Y.; Hongo, T.; Shihoyama, K.; Takai, H.; Miyamoto, I.; Midorikawa, K.
- Abstract
We demonstrate the fabrication of complicated three-dimensional (3D) microstructures embedded in a photosensitive glass by a high-order multiphoton process using a femtosecond (fs) laser. Direct writing of the fs laser followed by a post baking process and preferential etching in a dilute hydrofluoric (HF) acid solution results in a microplate that can freely move in hollow structures embedded in the glass. The fabricated structure functions as a microvalve that can control the flow direction of fluids in the microreactor.
- Subjects
MICROSTRUCTURE; THREE-dimensional imaging; PHOTOSENSITIVE glass; FEMTOCHEMISTRY; MULTIPHOTON processes; MICROPLATES; FLUIDS; FLUID mechanics
- Publication
Applied Physics A: Materials Science & Processing, 2004, Vol 78, Issue 7, p1029
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-003-2447-3