Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitlePost-annealing effect in reactive r.f.-magnetron-sputtered carbon nitride thin films.AuthorsChen, G. L.; Li, Y.; Lin, J.; Huan, C. H. A.; Guo, Y. P.PublicationSurface & Interface Analysis: SIA, 1999, Vol 28, Issue 1, p245ISSN0142-2421Publication typeArticleDOI10.1002/(SICI)1096-9918(199908)28:1<245::AID-SIA586>3.0.CO;2-I