Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleAnalytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices.AuthorsLi, J.; Niimi, H.; Gluschenkov, O.; Adusumilli, P.; Fronheiser, J.; Mochizuki, S.; Liu, Z.; Kamineni, V.; Raymond, M.; Carr, A. V; Yamashita, T.; Veeraraghavan, B.; Saulnier, N.; Gaudiello, J.PublicationMicroscopy & Microanalysis, 2018, Vol 24, p8ISSN1431-9276Publication typeAbstractDOI10.1017/S1431927618000533