Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleAtmospheric Pressure Glow Discharge CVD of Al<sub>2</sub>O<sub>3</sub> Thin Films.AuthorsHodgkinson, John L.; Sheel, David W.; Yates, Heather M.; Pemble, Martyn E.PublicationPlasma Processes & Polymers, 2006, Vol 3, Issue 8, p597ISSN1612-8850Publication typeArticleDOI10.1002/ppap.200600042