We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
A Fractal Analysis of the Nucleation Transition in Annealed La<sub>2</sub>O<sub>3</sub> Thin Films.
- Authors
Yang, Chen; Liu, Guodong; Yan, Lirong
- Abstract
A La2O3 thin film of 57 nm thickness was deposited by the electron beam evaporation method. To investigate the effect of annealing temperature on crystalline structure of La2O3 thin film, surface morphologies and crystalline states of annealed La2O3 thin films were characterized. It was found that fractal patterns presented on the surfaces of crystallized films with cubic phase. The connections between the annealing temperature and the surface morphology were disclosed by fractal analysis. Fractal dimension and multifractal spectra were calculated. It showed that the annealing temperature apparently affected the width of spectrum Δa<inline-graphic></inline-graphic> and the range of probability Δf<inline-graphic></inline-graphic>. Combining fractal characteristics with x-ray diffraction (XRD) results, it was found that there was a critical annealing temperature in the range of 850-900°C, above which a transition happened from the dominant hexagonal phase nucleation to the prevailing cubic phase nucleation.
- Subjects
FRACTAL analysis; ELECTRON beams; THIN films; ELECTRON beam annealing; CRYSTAL structure; X-ray diffraction
- Publication
Journal of Electronic Materials, 2018, Vol 47, Issue 9, p5352
- ISSN
0361-5235
- Publication type
Article
- DOI
10.1007/s11664-018-6423-2