Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleNovel fabrication method for long silicon microneedles with three-dimensional sharp tips and complicated shank shapes by isotropic dry etching.AuthorsIzumi, Hayato; Aoyagi, SeijiPublicationIEEJ Transactions on Electrical & Electronic Engineering, 2007, Vol 2, Issue 3, p328ISSN1931-4973Publication typeArticleDOI10.1002/tee.20147