Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleTagungen: Vakuum in Forschung und Praxis 4/2015.PublicationVakuum in Forschung und Praxis, 2015, Vol 27, Issue 4, p43ISSN0947-076XPublication typeOtherDOI10.1002/vipr.201590053