Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleTagungen: Vakuum in Forschung und Praxis 3/2014.PublicationVakuum in Forschung und Praxis, 2014, Vol 26, Issue 3, p44ISSN0947-076XPublication typeOtherDOI10.1002/vipr.201490025