Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleF + E - Vakuum in Forschung und Praxis 3/2008.PublicationVakuum in Forschung und Praxis, 2008, Vol 20, Issue 3, p52ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200890030