Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleBezugsquellen - Vakuum in Forschung und Praxis 2/2005.PublicationVakuum in Forschung und Praxis, 2005, Vol 17, Issue 2, p113ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200590016