Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleHigh Rate Aluminum Sputtering in Compact Disc Production.AuthorsLübbehusen, Michael; Seiler, Reiner; Sichmann, EggoPublicationVakuum in Forschung und Praxis, 1995, Vol 7, Issue 3, p194ISSN0947-076XPublication typeArticleDOI10.1002/vipr.19950070306