Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitlePure Silica Zeolite Films as Low- k Dielectrics by Spin-On of Nanoparticle Suspensions.AuthorsWang, Z. B.; Mitra, A.; Wang, H. T.; Huang, L. M.; Yan, Y.PublicationAdvanced Materials, 2001, Vol 13, Issue 19, p1463ISSN0935-9648Publication typeArticleDOI10.1002/1521-4095(200110)13:19<1463::AID-ADMA1463>3.0.CO;2-H