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- Title
Influence of Mixture Composition on Electrophysical Parameters and Emission Spectra of Tetrafluoromethane and Trifluoromethane Plasma with Nitrogen.
- Authors
Pivovarenok, S. A.; Murin, D. B.; Grazhdyan, A. Yu.
- Abstract
The influence of the mixture composition on the electrophysical parameters and plasma emission spectra of mixtures of tetrafluoromethane and trifluoromethane with nitrogen under dc glow discharge conditions has been analyzed. It has been established that the reduced electric field strength changes nonlinearly with an increase in the proportion of the second gas in both mixtures. The reduced intensity of atomic fluorine emission in the CF4/N2 mixture is shown to pass through a maximum at a nitrogen volume fraction of 0.2, whereas a monotonic change in this dependence is observed for the CHF3/N2 mixture. The reduced emission intensities of CF2 radicals decrease monotonically with an increase in the nitrogen fraction in both mixtures.
- Subjects
NITROGEN plasmas; MOLECULAR spectra; GLOW discharges; FLUOROFORM; MIXTURES; ELECTRIC fields
- Publication
High Energy Chemistry, 2023, Vol 57, Issue 2, p151
- ISSN
0018-1439
- Publication type
Article
- DOI
10.1134/S001814392302008X