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- Title
Synthesis of LiPON Solid Electrolyte Films by Thermal Evaporation of Lithium Orthophosphate.
- Authors
Gavrilov, Nikolay; Kamenetskikh, Alexander; Tretnikov, Petr; Ershov, Alexey
- Abstract
Lithium phosphorus-oxynitride (LiPON) films were deposited by the method of anodic evaporation of Li3PO4 in the nitrogen plasma of a low-pressure arc. A method for adjusting the degree of decomposition of vapors is proposed based on a change in the frequency of interaction of electrons with vapors at a constant heating power of the anode-crucible. The conditions ensuring the formation of films with a homogeneous microstructure and ionic conductivity (1–2) × 10−6 S/cm at a deposition rate of 8 nm/min have been determined. It is shown that the degree of vapor dissociation critically affects the morphology of the films and the magnitude of their ionic conductivity. The results of cyclic tests of LiPON films deposited by anodic evaporation in a low-pressure arc are presented.
- Subjects
THIN films; IONIC conductivity; SOLID electrolytes; ORTHOPHOSPHATES; NITROGEN plasmas; PLASMA arcs
- Publication
Coatings (2079-6412), 2023, Vol 13, Issue 10, p1765
- ISSN
2079-6412
- Publication type
Article
- DOI
10.3390/coatings13101765