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- Title
STEM-OBF 法を用いた電子線敏感材料の低ドーズ観察.
- Authors
橋口裕樹; 中村明穂
- Abstract
In recent years, scanning transmission electron microscopy (STEM) with aberration corrector has become widely popular due to its ability to achieve atomic resolution and analysis. On the other hand, observation of electron-beamsensitive materials such as catalysts and lithium-ion batteries at atomic resolution is requested. The newly developed STEM-optimum Bright Field (OBF) imaging is effective for this purpose. This method enables high-sensitivity and high-contrast observation even under low-dose conditions. In this paper, we explain the principles and practical conditions of the STEM-OBF and introduce its application results to catalyst materials such as zeolites and Metal Organic Frameworks (MOF), lithium-ion battery materials, and semiconductor devices.
- Publication
Vacuum & Surface Science, 2023, Vol 66, Issue 12, p695
- ISSN
2433-5835
- Publication type
Article
- DOI
10.1380/vss.66.695