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- Title
Applications of X-Ray Characterization for Advanced Materials in the Electronics Industry.
- Authors
Vigliante, A.; Kasper, N.; Brechbuehl, J.; Nolot, E.
- Abstract
Nanometer thick films, quantum dots, and quantum wires are the basis of the modern electronic industry. X-ray diffraction techniques play an increasingly important role as basic characterization tools for determining detailed structural information of ultrathin film such as the evolution of strain relaxation, defect formation, film/substrate interfacial properties, and the effects of the reduced dimensionality and structural correlations to electrical properties. Materials of technological interest are SiGe and strained Si; artificial substrates such as silicon on insulator; high- and low- κ dielectric materials, which will substitute SiO2; materials for interconnects; new materials for memory storage; micro-electro-mechanical systems (MEMS); and photovaltaics. An overview of the major X-ray scattering applications of interest to this industry will be presented in this article.
- Subjects
X-ray diffraction; THICK films; SCATTERING (Physics); SILICON; ELECTRONIC industries
- Publication
Metallurgical & Materials Transactions. Part A, 2010, Vol 41, Issue 5, p1167
- ISSN
1073-5623
- Publication type
Article
- DOI
10.1007/s11661-009-0116-7