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- Title
Performance Comparison of Cross-Like Hall Plates with Different Covering Layers.
- Authors
Fei Lyu; Zhenyan Zhang; Eng-Huat Toh; Xinfu Liu; Yinjie Ding; Yifan Pan; Chengjie Li; Li Li; Jin Sha; Hongbing Pan
- Abstract
This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account.
- Subjects
HALL effect devices; STRUCTURAL plates; RELIABILITY in engineering; P-type semiconductors; ELECTRIC circuits
- Publication
Sensors (14248220), 2015, Vol 15, Issue 1, p672
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s150100672