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- Title
Thermal conductivity and interfacial effect of parylene C thin film using the 3-omega method.
- Authors
Guermoudi, Amine Abdelkader; Cresson, Pierre Yves; Ouldabbes, Amaria; Boussatour, Ghizlane; Lasri, Tuami
- Abstract
Parylene has attracted a great interest in the last years because of its potential use in many fields. Among all kinds of parylene, parylene C seems the most interesting one for a large range of applications. In this paper, we are interested in its thermal properties, and in particular the thermal conductivity of thin films. This later is determined by the so-called three-omega method. This technique makes use of a thin conducting strip, in contact with the material under test. The metal wire serves both as a heat source for applying a heat flux and a sensitive thermometer for measuring the surface temperature. The thermal conductivity of parylene C films of different thicknesses (210, 440 and 760 nm) deposited by CVD process on borosilicate substrates is investigated. It is demonstrated that the effective thermal conductivity increases as a function of the thickness of thin film (81.20 × 10−3, 88.37 × 10−3 and 92.81 × 10−3 W m−1 K−1 are measured, respectively). This effect is produced by the phonon scattering boundary at the interface between substrate/film and film/heater. To highlight the presence of contact thermal resistances and to estimate their value, a numerical approach, based on a finite element method using the software COMSOL® Multiphysics, is also proposed. This study shows that the main part (97%) of the interfacial thermal resistance is due to the contact between the parylene C film and the substrate.
- Subjects
THERMAL resistance; THIN films; INTERFACIAL resistance; THERMAL conductivity; FINITE element method; MATERIALS testing; PHONON scattering
- Publication
Journal of Thermal Analysis & Calorimetry, 2021, Vol 145, Issue 1, p1
- ISSN
1388-6150
- Publication type
Article
- DOI
10.1007/s10973-020-09612-z