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- Title
Research on Machinability of Laser Modified AlN Substrates.
- Authors
CHEN Ni; WEI Jiawei; ZHANG Xinlei; LI Liang; HE Ning
- Abstract
The machinability of AlN ceramic substrates widely used in the packaging of microelectronic components were studied by laser modification method under different gas environments, laser powers and scanning intervals. The surface hardnesses and element contents of AlN specimen were measured by tests. The testing results show that under N2, Ar, and O2 gas environments, the surface components of the specimen are mainly AlN, Al and Al2O3, and the hardness of the cladding layers measured by microhardness tester is the lowest under the Ar environment, which is most conducive to the subsequent cutting. Under the Ar environment, with the increase of laser power and the decrease of scanning interval, the hardnesses of AlN surface modification decrease, and the minimum value may reach 174.83HV, making it easier to perform cutting.
- Subjects
MICROELECTRONIC packaging; ALUMINUM nitride; MICROHARDNESS
- Publication
China Mechanical Engineering, 2021, Vol 32, Issue 23, p2817
- ISSN
1004-132X
- Publication type
Article
- DOI
10.3969/j.issn.1004-132X.2021.23.005