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- Title
Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: a transparent and conductive platform for microdevices.
- Authors
Beke, S.; Kőrösi, L.; Sugioka, K.; Midorikawa, K.; Dékány, I.
- Abstract
new method for embedding transparent and conductive two- and three-dimensional microstructures in glass is presented. We show that the internal surface of hollow structures fabricated by femtosecond-laser direct writing inside the photosensitive glass can be coated by indium tin oxide (Sn-doped InO, ITO) using a sol-gel process. The idea of combining two transparent materials with different electrical properties, i.e., insulating and conductive, is very promising and hence it opens new prospects in manufacturing cutting edge microdevices, such as lab-on-a-chips (LOCs) and microelectromechanical systems (MEMS).
- Subjects
THREE-dimensional imaging; INDIUM compounds; OXIDES; THIN films; PHOTOSENSITIVE glass; ELECTRIC conductivity; MICROELECTROMECHANICAL systems; COLLOIDS
- Publication
Applied Physics A: Materials Science & Processing, 2011, Vol 102, Issue 2, p265
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-010-6173-3