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- Title
Influence of Laser Irradiation with hν = 1.96 eV on the Properties of Titanium–Silicon Contact under Thermal Annealing in Nitrogen.
- Authors
Nuprienok, I.S.; Shibko, A.N.
- Abstract
The effect of laser irradiation with hν = 1.96 eV (λ = 0.63 μm) on the properties of titanium–silicon contacts subjected to steady-state thermal annealing in a nitrogen atmosphere is studied. It is found that treatment-induced changes in the phase composition of the contact modify its electrophysical parameters. The applicability of laser irradiation to the formation of rectifying titanium–silicon junctions with desired parameters is demonstrated. © 2003 MAIK “Nauka / Interperiodica”.
- Subjects
IRRADIATION; LASERS
- Publication
Technical Physics, 2003, Vol 48, Issue 2, p257
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/1.1553570