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- Title
The Formation of β-FeSi[sub 2] Precipitates in Microcrystalline Si.
- Authors
Terukov, E. I.; Kon’kov, O. I.; Kudoyarova, V. Kh.; Gusev, O. B.; Davydov, V. Yu.; Mosina, G. N.
- Abstract
The formation of β-FeSi[SUB2] precipitates was observed for the first time in microcrystalline Si films. The Fe-doped amorphous Si films (a-Si:Fe) were obtained using magnetron sputtering. Subsequent short-time thermal treatment led to the transition of amorphous Si to microcrystalline Si and to the formation of β-FeSi[SUB2] precipitates. The samples synthesized emitted at the wavelength λ ≈ 1.54 μm at 100 K.
- Subjects
THIN films; SILICON; MAGNETRONS; AMORPHOUS semiconductors
- Publication
Semiconductors, 2002, Vol 36, Issue 11, p1235
- ISSN
1063-7826
- Publication type
Article
- DOI
10.1134/1.1521222