We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Development of a cryogenic stage for an ion-milling instrument.
- Authors
Terauchi, Masami; Satou, Futami; Sugizaki, Hideo; Suganuma, Katsuaki
- Abstract
A specimen-cooling device has been designed, manufactured and integrated into a commercial ion-milling instrument for transmission electron microscopy. The instrument enables us to prepare section specimens of tin-plated Cu without forming intermetallic compound particles and/or voids. The results show that cooling of specimen during ion-milling process is necessary for fine structure investigations of low melting temperature materials.
- Subjects
LOW temperature engineering; COOLING; SYSTEMS design; TRANSMISSION electron microscopy; TIN; COPPER; INTERMETALLIC compounds
- Publication
Journal of Electron Microscopy, 2011, Vol 60, Issue 1, p25
- ISSN
0022-0744
- Publication type
Article
- DOI
10.1093/jmicro/dfq069