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- Title
Coherence Improvement of Dual-Lens Electron Holography.
- Authors
Wang, Yun-Yu; Wang, Zhouguang; Jin, Qiang
- Abstract
Coherence is one of the limiting factors in off-axis electron holography applications. This paper reports methods to improve coherence ∼18-fold by using a smaller biprism and implementing a direct electron counting camera (K-camera) in combination with an imaging filter system. We achieved 0.4 nm fringe spacing with a 1.5 μm field-of-view and ∼33% fringe contrast. The maximum coherence number, N′ , of ∼1.8 × 103 was achieved, where N′ is defined as the number of fringes times fringe contrast. High spatial resolution junction profile images (nm scale) of n-channel and p-channel field-effect transistors (nFET and pFET) are demonstrated with a large field-of-view (μm scale).
- Subjects
ELECTRON holography; IMAGING systems; FIELD-effect transistors; SPATIAL resolution; ELECTRON optics; MULTISPECTRAL imaging
- Publication
Microscopy Today, 2023, Vol 31, Issue 4, p32
- ISSN
1551-9295
- Publication type
Article
- DOI
10.1093/mictod/qaad027