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- Title
An Experimental and Numerical Study of the Humidity Effect on the Stability of a Capacitive Ceramic Pressure Sensor.
- Authors
Zarnik, Marina Santo; Belavic, Darko
- Abstract
The effect of the humidity of the surrounding atmosphere on the characteristics of capacitive structures is a known problem for capacitive gas-pressure sensors. However, the use of a differential mode of operation can provide a good solution -- only the manufacturing of the ceramic structures with the appropriate pairs of capacitive sensing elements remains a major challenge. In order to find a compromise solution, the effect of the humid atmosphere and the moisture on the exterior of an LTCC-based capacitive pressure sensor was inspected closely through experimental and numerical analyses of various situations.
- Subjects
EXPERIMENTS; NUMERICAL analysis; PRESSURE transducers; STABILITY (Mechanics); ELECTRIC fields; CAPACITIVE sensor design &; construction
- Publication
Radioengineering, 2012, Vol 21, Issue 1, p201
- ISSN
1210-2512
- Publication type
Article