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- Title
The Contact Characteristics of SiCN Films for Opto-Electrical Devices Applications.
- Authors
Wen-Rong Chang; Yean-Kuen Fang; Shyh-Fann Ting; Shin-Fang Chen, Pavel; Chun-Yu Lin; Sheng-Beng Hwang, Pavel; Cheng-Nan Chang
- Abstract
This paper reports the study of ohmic and Schottky contacts to rapid-thermal chemical vapor deposition (RTCVD) deposited SiCN films in detail. Two prototypical blue-violet light-emitting devices with SiCN material based on the study have been developed. Both photoluminescence (PL) measurement and electroluminescence (EL) photography are used to evaluate the devices' optical performances. The experimental results show the potential of SiCN for advanced blue and ultraviolet (UV) optoelectronic applications.
- Subjects
CONTACT mechanics; THIN films; NITRIDES; SILICON; CARBON
- Publication
Journal of Electronic Materials, 2004, Vol 33, Issue 3, p181
- ISSN
0361-5235
- Publication type
Article
- DOI
10.1007/s11664-004-0177-8