Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleMathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array.AuthorsUNO, A. K. I. K. O.; HIRAI, Y. O. S. H. I. K. A. Z. U.; TSUCHIYA, T. O. S. H. I. Y. U. K. I.; TABATA, O. S. A. M. U.PublicationElectrical Engineering in Japan, 2018, Vol 204, Issue 2, p50ISSN0424-7760Publication typeArticleDOI10.1002/eej.23104