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- Title
Three-Dimensional Microcoil Oscillator Fabricated with Monolithic Process on LSI.
- Authors
YABE, TOMOTAKA; MIMURA, YASUHIRO; TAKAHASHI, HIROKAZU; ONOE, ATSUSHI; MUROGA, SHO; YAMAGUCHI, MASAHIRO; ONO, TAKAHITO; ESASHI, MASAYOSHI
- Abstract
Integration of three-dimensional microcoils on high-performance RF-LSI is one of the key technologies to realize future wireless telecommunication services and hypersensitive capacitance sensor systems. We designed and fabricated monolithic three-dimensional microcoils on an LSI substrate. The microcoil has long legs, which will minimize electromagnetic coupling to the LSI substrate. We succeeded in confirming the basic operation of the integrated oscillator circuit in the gigahertz frequency range. It was confirmed that process damage due to plasma ashing, heating at 200 °C, and sputter etching were not observed in the oscillation performance.
- Subjects
RADIO frequency; LARGE scale integration of circuits; ELECTROMAGNETIC coupling; OSCILLATIONS; ETCHING
- Publication
Electronics & Communications in Japan, 2012, Vol 95, Issue 11, p49
- ISSN
1942-9533
- Publication type
Article
- DOI
10.1002/ecj.11404