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- Title
Nanometric displacement measurement based on interference fringes deflection.
- Authors
González-Rivera, Hely; Sandoval-Romero, G. E.
- Abstract
A hybrid method to obtain nanometric displacements based on interference fringes movement by optical beam deflection is proposed. A proof-of-principle experiment is described as a new method for real-time detection and measurement of small vibrations, experimental results shows an increase in the resolution compared with a simply optical beam deflection read out. Also, there is minimum detectable displacement in an assumed noise environment.
- Subjects
NANOSTRUCTURED materials; NANOELECTROMECHANICAL systems; NANOMETROLOGY; OPTICAL beam induced current; DISPLACEMENT currents (Electric)
- Publication
Vibroengineering Procedia, 2017, Vol 11, p140
- ISSN
2345-0533
- Publication type
Article
- DOI
10.21595/vp.2017.18441