Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleMechanical Properties and Microstructural Characterization of Amorphous SiC<sub> x</sub>N<sub> y</sub> Thin Films After Annealing Beyond 1100°C.AuthorsCtvrtlik, Radim; Kulikovsky, Valeriy; Vorlicek, Vladimir; Tomastik, Jan; Drahokoupil, Jan; Jastrabik, Lubomir; Ctvrtlik, R.PublicationJournal of the American Ceramic Society, 2016, Vol 99, Issue 3, p996ISSN0002-7820Publication typeArticleDOI10.1111/jace.14057