Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleRoom Temperature Phase Transition of W‐Doped VO<sub>2</sub> by Atomic Layer Deposition on 200 mm Si Wafers and Flexible Substrates.AuthorsSun, Kai; Wheeler, Callum; Hillier, James A.; Ye, Sheng; Zeimpekis, Ioannis; Urbani, Alessandro; Kalfagiannis, Nikolaos; Muskens, Otto L.; de Groot, Cornelis H.PublicationAdvanced Optical Materials, 2022, Vol 10, Issue 23, p1ISSN2195-1071Publication typeArticleDOI10.1002/adom.202201326