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- Title
Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors.
- Authors
Lee, Chia-Yen; Yu, Cheng-Xue; Lin, Kuan-Yu; Fu, Lung-Ming
- Abstract
Pyroelectric infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric films is improved through annealing at a temperature of 500 °C for 4 h. The temperature variation and voltage responsivity of the fabricated sensors are evaluated numerically and experimentally for substrate thickness in the range of 1 to 500 μm. The results show that the temperature variation and voltage responsivity both increase with a reducing substrate thickness. For the lowest film thickness of 1 μm, the sensor achieves a voltage sensitivity of 3880 mV/mW at a cutoff frequency of 400 Hz. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors.
- Subjects
PYROELECTRIC detectors; VOLTAGE; ETCHING techniques; ZINC oxide films; ZINC oxide; REFERENCE sources; PHOTOLITHOGRAPHY
- Publication
Applied Sciences (2076-3417), 2021, Vol 11, Issue 19, p9074
- ISSN
2076-3417
- Publication type
Article
- DOI
10.3390/app11199074