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- Title
Optical and Electrophysical Properties of Thin Zinc Oxide Films Doped with Manganese Oxide and Obtained by Laser Deposition.
- Authors
Bosak, N. A.; Chumakov, A. N.; Shevchenok, A. A.; Baran, L. V.; Karoza, A. G.; Malutina-Bronskaya, V. V.; Ivanov, A. A.
- Abstract
Nanostructured thin films on a silicon substrate were obtained on a ceramic of zinc oxide doped with manganese oxide by high-frequency periodic pulsed laser action with f ~ 10–15 kHz, wavelength λ = 1.064 μm at power density q = 150 MW/cm2 in a vacuum chamber with p = 2.7 Pa. The surface morphology and the elemental composition of the obtained films were studied using atomic force microscopy, scanning electron microscopy, and X-ray spectral microanalysis. Features of the transmission spectra in the visible, near, and middle IR regions were determined. The electrophysical properties of the ZnO + 2% MnO2/Si heterostructure were analyzed.
- Subjects
ZINC oxide thin films; LASER deposition; OPTICAL properties; SILICON films; ATOMIC force microscopy; X-ray microanalysis; ZINC oxide
- Publication
Journal of Applied Spectroscopy, 2021, Vol 88, Issue 2, p283
- ISSN
0021-9037
- Publication type
Article
- DOI
10.1007/s10812-021-01170-y