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- Title
Optimization design and research of ultrasonic flowmeter based on time difference method.
- Authors
Chen, Chang; Sun, Weijie; Zhou, Rui; Lin, Chen; Chu, Changyong; Su, Shaohui
- Abstract
This paper presents an optimized design method for an ultrasonic flow meter (USFM) used in the semiconductor manufacturing field for liquid flow measurement. Based on fluid simulation, the impact of different inlet tube section angles on the velocity distribution within the measuring tube section of the USFM was analyzed, and a suitable inlet tube section angle of 45° was determined. Based on the average flow velocity on the acoustic channel line and the average flow velocity in the measuring tube section, a velocity correction factor was calculated to adjust the measured flow velocity to the actual flow velocity of the tested fluid. The USFM prototype was calibrated for flow rate and a compensation factor obtained to correct measured flow rate. The accuracy of the USFM was tested and found to reach 1.5 level, meeting the needs for liquid flow measurement in the semiconductor manufacturing field.
- Subjects
FLOW velocity; SPEED of sound; ULTRASONICS; EXPERIMENTAL design; FLOW measurement; PIPE flow; PIPE
- Publication
Journal of Mechanical Science & Technology, 2024, Vol 38, Issue 1, p245
- ISSN
1738-494X
- Publication type
Article
- DOI
10.1007/s12206-023-1221-z