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- Title
Performance Improvement of Total Ionization Dose Radiation Sensor Devices Using Fluorine-Treated MOHOS.
- Authors
Wen-Ching Hsieh; Hao-Tien Daniel Lee; Fuh-Cheng Jong; Shich-Chuan Wu
- Abstract
Fluorine-treated titanium nitride-silicon oxide-hafnium oxide-silicon oxide-silicon devices (hereafter F-MOHOS) are candidates for total ionization dose (TID) radiation sensor applications. The main subject of the study reportedherein is the performance improvement in terms of TID radiation-induced charge generation effect and charge-retention reliability characterization for F-MOHOS devices. In the case of F-MOHOS TID radiation sensors, the gamma radiation induces a significant decrease of threshold voltage VT and the radiation-induced charge density is nearly six times larger than that of standard metal-oxide-nitride-oxide-silicon MONOS devices. The decrease of VT for F-MOHOS after gamma irradiation has a strong correlation to the TID up to 5 Mrad gamma irradiation as well. The improvement of charge retention loss for F-MOHOS devices is nearly 15% better than that of metal-oxide-hafnium oxide-oxide-silicon MOHOS devices. The F-MOHOS device described in this study demonstrates better feasibility for non-volatile TID radiation sensing in the future.
- Subjects
IONIZING radiation dosage; HAFNIUM oxide; NUCLEAR counters; THRESHOLD voltage; FLUORINE; SPECTRUM analysis; CHARGE density waves
- Publication
Sensors (14248220), 2016, Vol 16, Issue 4, p450
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s16040450