Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleDeposition of Optical Coatings on Micro-Optics Using Atomic Layer Deposition.AuthorsAstrauskyte, D.; Galvanauskas, K.; Gailevicius, D.; Drazdys, M.; Drazdys, R.; Malinauskas, M.; Grineviciute, L.PublicationVilnius University Proceedings, 2022, Vol 29, p57ISSN2669-0233Publication typeArticle