We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
反応性プラズマを援用したセラミックス材料の ダメージフリー形状創成・仕上げ加工技術の開発
- Authors
山村 和也
- Abstract
We are developing plasma nanoManufacturing process based on atmospheric pressure plasma process. This process consists of plasma CVM technique for shape creation and plasma-assisted polishing technique for surface finishing, and it makes it possible to create an arbitrary shape with nanometer order shape accuracy without forming subsurface damage. In this article, we introduce the outline of plasma nanoManufacturing process and some results.
- Subjects
SURFACE finishing; PLASMA pressure; NANOMANUFACTURING; ATMOSPHERIC pressure; GEOMETRIC shapes; GRINDING &; polishing
- Publication
Journal of the Japan Society of Powder & Powder Metallurgy / Funtai Oyobi Fummatsu Yakin, 2018, Vol 65, Issue 10, p654
- ISSN
0532-8799
- Publication type
Article