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- Title
Controlling the size and curvature radius of concave microlens array on fused silica by wet-etching-assisted with picosecond laser.
- Authors
Kong, Dejian; Sun, Xiaoyan; Zhang, Limu; Hu, Youwang; Duan, Ji-an
- Abstract
In this paper, we study wet-etching-assisted with picosecond laser for the fabrication of concave MLA on fused silica. Compared with the previous reports about femtosecond laser, wet-etching-assisted with picosecond laser also has the capability of fabricating high quality concave MLA on fused silica. By controlling the pulse energy of picosecond laser and the wet-etching time, the size and curvature radius of microlens can be readily controlled. The focal length of the concave MLA can be controlled from − 88.13 to − 216.96 μm by wet-etching time. Moreover, the F number can be also controlled from 3.30 to 1.47 by controlling the pulse energy. The lowest surface roughness of the microlens is 36 nm. In addition, the MLAs show good optical performance on optical imaging with uniformity up to 0.96. We believe wet-etching-assisted with picosecond laser can be also applied in the fabrication of other micro-optical elements such as Fresnel zone plate, grating, compound eyes and so on.
- Subjects
FUSED silica; ULTRASHORT laser pulses; FOCAL length; LASERS; CURVATURE
- Publication
Applied Physics A: Materials Science & Processing, 2024, Vol 130, Issue 2, p1
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-023-07222-8