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- Title
A New Limitation of the Depth Resolution in TOF-SIMS Elemental Profiling: the Influence of a Probing Ion Beam.
- Authors
Drozdov, M. N.; Drozdov, Yu. N.; Novikov, A. V.; Yunin, P. A.; Yurasov, D. V.
- Abstract
New data concerning the influence of a probing beam of bismuth ions on the depth resolution in elemental depth profiling by secondary ion mass spectrometry (SIMS) have been obtained on a TOF.SIMS-5 system using the principle of two separate ion beams. It is established that the existing criterion of nondestructive character of the probing beam, on which this principle is based, is insufficient. Additional processes must be taken into account so as to formulate a more adequate criterion. A regime of depth profiling is proposed that allows the depth resolution to be improved at low energies of sputtering ions.
- Subjects
SECONDARY ion mass spectrometry; ION beams; SPUTTERING (Physics); ION scattering spectrometry; TIME-of-flight mass spectrometry
- Publication
Technical Physics Letters, 2018, Vol 44, Issue 4, p320
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785018040181