Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleThree-dimensional profilometer for supersmooth surface.AuthorsYuanqing WangPublicationOptical Engineering, 2003, Vol 42, Issue 10, p3013ISSN0091-3286Publication typeArticleDOI10.1117/1.1603758