Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleElectron-beam-deposited Mo/Si and Mo<sub>x</sub>Si<sub>y</sub>/Si multilayer x-ray mirrors and gratings.AuthorsSchmiedeskamp, Bernt; Kloidt, Andreas; Stock, Hans-Jürgen; Kleineberg, Ulf; Döhring, Thorsten; Pröpper, Michael; Rahn, Steffen; Hilgers, Kerstin; Heidemann, Bernhard; Tappe, Thorsten; Heinzmann, Ulrich; Krumrey, Michael K.; Müller, Peter; Schoize, Frank; Heidemann, Klaus F.PublicationOptical Engineering, 1994, Vol 33, Issue 4, p1314ISSN0091-3286Publication typeArticleDOI10.1117/12.163207